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  • BSI
    20/30349837 DC BS ISO 21820. Fine ceramics (advanced ceramics, advanced technical ceramics). Ultraviolet photoluminescence image test method for analyzing polytypes of boron and nitrogen doped SiC crystals
    Edition: 2020
    $42.22
    / user per year

Description of 20/30349837 DC 2020

This document specifies the testing method to determine the polytypes and their ratio in silicon carbide (SiC) wafers or bulk crystals using ultraviolet photoluminescence (UVPL) image test method. The range of SiC is limited to semiconductor SiC into which nitrogen and boron are doped to have the deep acceptor level and the shallow donor level, respectively. The SiC wafers or bulk crystals in this document typically show electrical resistivities ranging 10-2 ~ 10-3 ohm- cm, applicable to power electronic devices.

SiC to which this method is applicable: The silicon carbide (SiC) crystal of 4H, 6H and 15R polytypes, containing boron and nitrogen as acceptor and donor, respectively, at the concentrations generating Donor-Acceptor pairs to cause the UVPL . The boron and nitrogen concentration are typically 1016 and 1018 cm-3 order, respectively, in 4H SiC. When the sample is an epitaxial wafer, it should have the epitaxial layer thickness sufficiently larger than the laser penetration depth, in addition to having the boron and nitrogen dopants at the necessary concentrations. Semi-insulating SiC is not applicable, because it usually contains quite little boron and nitrogen for achieving the very high electrical resistivity.



Standard Number20/30349837 DC
TitleBS ISO 21820. Fine ceramics (advanced ceramics, advanced technical ceramics). Ultraviolet photoluminescence image test method for analyzing polytypes of boron and nitrogen doped SiC crystals
StatusDefinitive
Publication Date2020-04-10
Identical National Standard OfISO/DIS 21820
DescriptorsTest specimens, Bond strength, Test methods, Special ceramics, Ceramics
ICS81.060.30 Advanced ceramics
CommitteeRPI/13
PublisherBSI
Pages33

About BSI

BSI Group, also known as the British Standards Institution is the national standards body of the United Kingdom. BSI produces technical standards on a wide range of products and services and also supplies certification and standards-related services to businesses.
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