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Description of ASTM-F1569 1999ASTM F1569-94-Reapproved1999Withdrawn Standard: Standard Guide for Generation of Consensus Reference Materials for Semiconductor Technology (Withdrawn 2003)ASTM F1569Scope This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This guide covers the procedures for producing a single set of consensus reference materials (ConRefs) in the absence of suitable certified reference materials from an established source. 1.2 This guide covers the steps to be taken to generate a set of ConRefs for a specific property or family of related properties required in semiconductor technology. 1.3 The procedure for generating the set of ConRefs is based on interlaboratory testing in accordance with Practice E691. It is assumed for the purposes of this guide that the test method evaluated by the interlaboratory study (ILS) is appropriate for determining the property values of the ConRef. This guide does not cover the selection of one of several possible test methods nor does it cover the case for which other reference materials must be used in the measurement of the properties of the ConRef. 1.4 This guide also describes procedures that may be used to generate consensus property values that may form the basis for the generation of multiple sets of CRMs or reference materials (RMs). Keywords certified reference material; consensus reference material; flat panel display; interlaboratory experiment; reference material; semiconductor; silicon; sputtering target; working reference material ICS Code ICS Number Code 29.045 (Semiconducting materials) DOI: 10.1520/F1569-94R99 This book also exists in the following packages...Subscription InformationMADCAD.com ASTM Standards subscriptions are annual and access is unlimited concurrency based (number of people that can access the subscription at any given time) from single office location. For pricing on multiple office location ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.
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About ASTMASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide. |
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