FORMAT
BOOKS
PACKAGES
EDITION
PUBLISHER
CONTENT TYPE
Act
Admin Code
Announcements
Bill
Book
CADD File
CAN
CEU
Charter
Checklist
City Code
Code
Commentary
Comprehensive Plan
Conference Paper
County Code
Course
DHS Documents
Document
Errata
Executive Regulation
Federal Guideline
Firm Content
Guideline
Handbook
Interpretation
Journal
Land Use and Development
Law
Legislative Rule
Local Amendment
Local Code
Local Document
Local Regulation
Local Standards
Manual
Model Code
Model Standard
Notice
Ordinance
Other
Paperback
PASS
Periodicals
PIN
Plan
Policy
Product
Program
Provisions
Requirements
Revisions
Rules & Regulations
Standards
State Amendment
State Code
State Manual
State Plan
State Standards
Statute
Study Guide
Supplement
Technical Bulletin
All
|
Description of ASTM-F1389 2000ASTM F1389-00Withdrawn Standard: Standard Test Methods for Photoluminescence Analysis of Single Crystal Silicon for III-V Impurities (Withdrawn 2003)ASTM F1389Scope This standard was transferred to SEMI (www.semi.org) May 2003 1.1 These test methods cover the simultaneous determination of electrically active boron, phosphorus, arsenic, and aluminum content in low-dislocation mono-crystalline silicon. 1.2 These test methods can be used for samples that have majority dopant densities between approximately 1 X 1011 and 5 X 1015 atoms/cm3. 1.3 The concentrations obtained using these test methods are based on an empirically determined relationship of the logarithm of the concentration to the logarithm of specific luminescence line-intensity ratios. 1.4 The empirical relationship established assumes a constant sample excitation level for all measurements on a given instrument. 1.5 To accommodate differences in instrumentation, two methods are included in this proposal. "Test Method A" refers to procedures appropriate for dispersive infrared spectrophotometers operating under the high sample excitation conditions and "Test Method B" refers to procedures appropriate for Fourier transform instruments operating under low excitation conditions. 1.5.1 Typical calibration curves for each test method are provided. These curves are modified for each instrument using the analysis of standard samples as reference data. Once modified, the curves for a given instrument should produce sample dopant density values that agree with other similarly operated instruments using the same test method. Data obtained using Test Method A may not agree with data obtained using Test Method B, hence values must be reported with reference to the test method used. 1.6 Many laboratories use photoluminescence to analyze epitaxial layers. However this application encounters many variables and the underlying physics is not fully understood; hence these test methods do not attempt to outline standard practices regarding such analysis. 1.7 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Keywords aluminum; arsenic; boron; dopant; impurities; phosphurus; photoluminescence; silicon ICS Code ICS Number Code 29.045 (Semiconducting materials) DOI: 10.1520/F1389-00 This book also exists in the following packages...Subscription InformationMADCAD.com ASTM Standards subscriptions are annual and access is unlimited concurrency based (number of people that can access the subscription at any given time) from single office location. For pricing on multiple office location ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.
Some features of MADCAD.com ASTM Standards Subscriptions are: - Immediate Access: As soon as the transaction is completed, your ASTM Standards Subscription will be ready for access.
For any further information on MADCAD.com ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.
About ASTMASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide. |
GROUPS
|