ASTM E986-04
Historical Standard: ASTM E986-04 Standard Practice for Scanning Electron Microscope Beam Size Characterization
SUPERSEDED (see Active link, below)
ASTM E986
1. Scope
1.1 This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized. The resolution of an SEM depends on many factors, some of which are electron beam voltage and current, lens aberrations, contrast in the specimen, and operator-instrument-material interaction. However, the resolution for any set of conditions is limited by the size of the electron beam. This size can be quantified through the measurement of an effective apparent edge sharpness for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces, for example, Y -deflection waveform generation, for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 50 000 x. Higher magnifications may be attempted, but difficulty in making precise measurements can be expected.
1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ASTM Standards
E7 Terminology Relating to Metallography
E766 Practice for Calibrating the Magnification of a Scanning Electron Microscope
Keywords
electron beam size; E766; graphite fiber; magnification; NIST SRM 2069B; resolution; SEM; SEM performance; spot size; waveform; Electron microscopy; Scanning electron microscope (SEM) ;
ICS Code
ICS Number Code 31.120 (Electronic display devices); 37.020 (Optical equipment)
DOI: 10.1520/E0986-04
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