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  • ASTM
    E834-09(2015) Standard Practice for Determining Vacuum Chamber Gaseous Environment Using a Cold Finger
    Edition: 2015
    $93.60
    Unlimited Users per year

Description of ASTM-E834 2015

ASTM E834-09-Reapproved2015

Historical Standard: Standard Practice for Determining Vacuum Chamber Gaseous Environment Using a Cold Finger




ASTM E834

Scope

1.1 This practice covers a technique for collecting samples of materials that are part of the residual gas environment of an evacuated vacuum chamber. The practice uses a device designated as a “cold finger” that is placed within the environment to be sampled and is cooled so that constituents of the environment are retained on the cold-finger surface.

1.2 The practice covers a method for obtaining a sample from the cold finger and determining the weight of the material removed from the cold finger.

1.3 The practice contains recommendations as to ways in which the sample may be analyzed to identify the constituents that comprise the sample.

1.4 By determining the species that constitute the sample, the practice may be used to assist in defining the source of the constituents and whether the sample is generally representative of samples similarly obtained from the vacuum chamber itself.

1.5 This practice covers alternative approaches and usages to which the practice can be put.

1.6 The degree of molecular flux anisotropy significantly affects the assurance with which one can attribute characteristics determined by this procedure to the vacuum chamber environment in general.

1.7 The temperature of the cold finger significantly affects the quantity and species of materials collected.

1.8 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.9 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific warning statements, see Section 8.


Keywords

cold finger; contamination monitoring; residual gas compositions; vacuum chamber;


ICS Code

ICS Number Code 23.160 (Vacuum technology)


DOI: 10.1520/E0834-09R15

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About ASTM

ASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide.
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