Significance and Use

This test method provides for accurate and reproducible enumeration of particles and fibers released from a wiper immersed in a cleaning solution with moderate mechanical stress applied. When performed correctly, this counting test method is sensitive enough to quantify very low levels of total particle and fiber burden. The results are accurate and not influenced by artifact or particle size limitations. A further advantage to this technique is that it allows for morphological as well as X-ray analysis of individual particles.

1. Scope

1.1 This test method covers testing all wipers used in cleanrooms and other controlled environments for characteristics related to particulate cleanliness.

1.2 This test method includes the use of computer-based image analysis and counting hardware and software for the counting of densely particle-laden filters (see 7.7-7.9). While the use of this equipment is not absolutely necessary, it is strongly recommended to enhance the accuracy, speed, and consistency of counting.

1.3 The values stated in SI units are to be regarded as the standard.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

ASTM Standards

D1193 Specification for Reagent Water

F25 Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas

F312 Test Methods for Microscopical Sizing and Counting Particles from Aerospace Fluids on Membrane Filters

Keywords

cleanroom wipers; contamination control; membrane filter; optical microscopy; particle counting and sizing; particles and fibers; scanning electron microscopy; Cleanrooms (materials/applications); Fiber analysis; Optical electron microscopy; Particle counters/counting; Scanning electron microscope (SEM); Size-diferentiated counting

ICS Code

ICS Number Code 13.040.35 (Cleanrooms and associated controlled environments)

DOI: 10.1520/E2090-12

ASTM International is a member of CrossRef.

ASTM E2090