FORMAT
BOOKS
PACKAGES
EDITION
PUBLISHER
CONTENT TYPE
Act
Admin Code
Announcements
Bill
Book
CADD File
CAN
CEU
Charter
Checklist
City Code
Code
Commentary
Comprehensive Plan
Conference Paper
County Code
Course
DHS Documents
Document
Errata
Executive Regulation
Federal Guideline
Firm Content
Guideline
Handbook
Interpretation
Journal
Land Use and Development
Law
Legislative Rule
Local Amendment
Local Code
Local Document
Local Regulation
Local Standards
Manual
Model Code
Model Standard
Notice
Ordinance
Other
Paperback
PASS
Periodicals
PIN
Plan
Policy
Product
Program
Provisions
Requirements
Revisions
Rules & Regulations
Standards
State Amendment
State Code
State Manual
State Plan
State Standards
Statute
Study Guide
Supplement
Technical Bulletin
All
|
Description of ASTM-F1619 2000ASTM F1619-95-e1-Reapproved2000Withdrawn Standard: Standard Test Method for Measurement of Interstitial Oxygen Content of Silicon Wafers by Infrared Absorption Spectroscopy with p-Polarized Radiation Incident at the Brewster Angle (Withdrawn 2003)ASTM F1619Scope This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This test method covers determination of the absorption coefficient due to the interstitial oxygen content of commercial monocrystalline silicon wafers by means of Fourier transform infrared (FT-IR) spectroscopy. In this test method, the incident radiation is p-polarized and incident on the test specimen at the Brewster angle in order to minimize multiple reflections. Note 1—In this test method, radiation in which the electric vector is parallel to the plane of incidence is defined as p-polarized radiation. Note 2—Committee F01 has been advised that some aspects of this test method may be subject to a patent applied for by Toshiba Ceramics Corporation. The Committee takes no position with respect to the applicability or validity of such patents, but it requests users of this test method and other interested parties to supply any information available on non-patented alternatives for use in connection with this test method. 1.2 Since the interstitial oxygen concentration is proportional to the absorption coefficient of the 1107 cm1 absorption band, the interstitial oxygen content of the wafer can be derived directly using an independently determined calibration factor. 1.3 The test specimen is a single-side polished silicon wafer of the type specified in SEMI Specifications M1. The front surface of the wafer is mirror polished and the back surface may be as-cut, lapped, or etched (see 8.1.1.1). 1.4 This test method is applicable to silicon wafers with resistivity greater than 5 Ωcm at room temperature. 1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Keywords Brewster angle; infrared absorption; interstitial oxygen; oxygen; silicon ICS Code ICS Number Code 29.045 (Semiconducting materials) DOI: 10.1520/F1619-95R00E01 This book also exists in the following packages...Subscription InformationMADCAD.com ASTM Standards subscriptions are annual and access is unlimited concurrency based (number of people that can access the subscription at any given time) from single office location. For pricing on multiple office location ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.
Some features of MADCAD.com ASTM Standards Subscriptions are: - Immediate Access: As soon as the transaction is completed, your ASTM Standards Subscription will be ready for access.
For any further information on MADCAD.com ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.
About ASTMASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide. |
GROUPS
|