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  • NFPA
    NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities
    This title can only be subscribed to with another NFPA title (See details)
    Edition: 2009
    $187.74
    / user per year

Description of NFPA 318 2009

Per NFPA's requirements, when purchasing NFPA 2021 Standards and/or 2020 NFPA 70 (NEC), you must subscribe to at least one more NFPA Standard to complete your purchase. In order to fulfill this requirement, we automatically add 2019 NFPA 900 to your cart. This title may be removed during checkout if you choose to add a different NFPA standard to your cart, and pricing will be recalculated accordingly.

Today's NFPA 318 safeguards people and property in plants and research facilities.

NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled--containing a cleanroom or clean zone or both. For the 2009 edition, the document's scope was revised to apply to semiconductor fabrication facilities and areas with comparable fabrication processes and risks.

Major technical changes for 2009 include:

  • First-time requirements for Sub Atomic Gas (SAG) Systems
  • New requirements involving exhaust ducts
  • Maximum hazardous chemical quantities at a workstation limited to 3 cylinders to reduce change-out frequency
  • Revisions to safety considerations for chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, and production and support equipment

Facility owners and managers, plant safety directors, safety trainers, risk insurers, and AHJs need the latest requirements based on industry needs, new technology, and recent experience.

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About NFPA

The mission of the international nonprofit NFPA, established in 1896, is to reduce the worldwide burden of fire and other hazards on the quality of life by providing and advocating consensus codes and standards, research, training, and education.

 

The world's leading advocate of fire prevention and an authoritative source on public safety, NFPA develops, publishes, and disseminates more than 300 consensus codes and standards intended to minimize the possibility and effects of fire and other risks.

 

NFPA membership totals more than 70,000 individuals around the world

 

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