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  • ASTM
    F2405-04(2011) Standard Test Method for Trace Metallic Impurities in High Purity Copper by High-Mass-Resolution Glow Discharge Mass Spectrometer
    Edition: 2011
    $93.60
    Unlimited Users per year

Description of ASTM-F2405 2011

ASTM F2405 - 04(2011)

Standard Test Method for Trace Metallic Impurities in High Purity Copper by High-Mass-Resolution Glow Discharge Mass Spectrometer

Active Standard ASTM F2405 | Developed by Subcommittee: F01.17

Book of Standards Volume: 10.04




ASTM F2405

Significance and Use

This test method is intended for application in the semiconductor industry for evaluating the purity of materials (for example, sputtering targets, evaporation sources) used in thin film metallization processes. This test method may be useful in additional applications, not envisioned by the responsible technical committee, as agreed upon between the parties concerned.

This test method is intended for use by GDMS analysts in various laboratories for unifying the protocol and parameters for determining trace impurities in copper. The objective is to improve laboratory-to-laboratory agreement of analysis data. This test method is also directed to the users of GDMS analyses as an aid to understanding the determination method, and the significance and reliability of reported GDMS data.

For most metallic species, the detection limit for routine analysis is on the order of 0.01 wt. ppm. With special precautions, detection limits to sub-ppb levels are possible.

This test method may be used as a referee method for producers and users of electronic-grade copper materials.

1. Scope

1.1 This test method covers the concentrations of trace metallic impurities in high purity (99.95 wt. % pure, or purer, with respect to metallic trace impurities) electronic grade copper.

1.2 This test method pertains to analysis by magnetic-sector glow discharge mass spectrometer (GDMS).

1.3 This test method does not include all the information needed to complete GDMS analyses. Sophisticated computer-controlled laboratory equipment, skillfully used by an experienced operator, is required to achieve the required sensitivity. This test method does cover the particular factors (for example, specimen preparation, setting of relative sensitivity factors, determination of detection limits, and the like) known by the responsible technical committee to effect the reliability of high purity copper analyses.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

ASTM Standards

E135 Terminology Relating to Analytical Chemistry for Metals, Ores, and Related Materials

E173 Practice for Conducting Interlaboratory Studies of Methods for Chemical Analysis of Metals

E180 Practice for Determining the Precision of ASTM Methods for Analysis and Testing of Industrial and Specialty Chemicals

E691 Practice for Conducting an Interlaboratory Study to Determine the Precision of a Test Method

E876 Practice for Use of Statistics in the Evaluation of Spectrometric Data

F1593 Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer


Keywords

copper; electronics; glow discharge mass spectrometer (GDMS); purity analysis; sputtering target; trace metallic impurities; Copper; Glow discharge mass spectrometer (GDMS); Purity analysis; Sputtering process/targets; Trace metallic impurities ;


ICS Code

ICS Number Code 77.120.30 (Copper and copper alloys)


DOI: 10.1520/F2405-04R11

ASTM International is a member of CrossRef.

ASTM F2405

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ASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide.

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