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Description of ASTM-F1711 1996ASTM F1711-96Historical Standard: Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point ProbeASTM F1711Scope 1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates, used in making flat panel information displays. It is assumed that the thickness of the conductive thin film is much thinner than the spacing of the contact probes used to measure the sheet resistance. 1.2 This standard is intended to be used with Test Method F 390. 1.3 Sheet resistively in the range of 0.5 to 5000 ohms per square may be measured by this practice. The sheet resistance is assumed uniform in the area being probed. 1.4 This practice is applicable to flat surfaces only. 1.5 Probe pin spacings of 1.5 mm to 5.0 mm, inclusive (0.059 to 0.197in. inclusive) are covered by this practice. 1.6 The method in this practice is potentially destructive to the thin film in the immediate area in which the measurement is made. Areas tested should thus be characteristic of the functional part of the substrate, but should be remote from critical active regions. The method is suitable for characterizing dummy test substrates processed at the same time as substrates of interest. 1.7 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only. 1.8 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Keywords film conductors ICS Code ICS Number Code n/a DOI: 10.1520/F1711-96 The following editions for this book are also available...This book also exists in the following packages...Subscription InformationMADCAD.com ASTM Standards subscriptions are annual and access is unlimited concurrency based (number of people that can access the subscription at any given time) from single office location. For pricing on multiple office location ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.
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