ASTM F1594-95(2003)
Historical Standard: ASTM F1594-95(2003) Standard Specification for Pure Aluminum (Unalloyed) Source Material for Vacuum Coating Applications
SUPERSEDED (see Active link, below)
ASTM F1594
1. Scope
1.1 This specification covers pure aluminum metal (unalloyed) for use as raw material for making evaporation sources, sputtering targets, and superconducting wires.
1.2 This specification sets purity grade levels, physical attributes, analytical methods, and packaging requirements.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ASTM Standards
E29 Practice for Using Significant Digits in Test Data to Determine Conformance with Specifications
E112 Test Methods for Determining Average Grain Size
Keywords
aluminum source; evaporation; thin films; vacuum coating; Aluminum--specifications; Aluminum electrical conductors (semiconductors); Aluminum source; Electronic materials/applications--specifications; Electronic thin-film applications--specifications; Evaporators/evaporation--specifications; Sputtering process/targets--specifications; Superconducting wires; Vacuum coating applications;
ICS Code
ICS Number Code 25.220.40 (Metallic coatings)
DOI: 10.1520/F1594-95R03
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