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Description of ASTM-F1513 2011ASTM F1513 - 99(2011)Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film ApplicationsActive Standard ASTM F1513 | Developed by Subcommittee: F01.17 Book of Standards Volume: 10.04 ASTM F1513Abstract This specification sets purity grade levels, physical attributes, analytical methods, and packaging of three grades of pure unalloyed aluminum source materials for electronic thin film applications such as evaporation sources and sputtering targets. The impurity levels should be analyzed using the proposed method and should be within the specified range for each grade. This abstract is a brief summary of the referenced standard. It is informational only and not an official part of the standard; the full text of the standard itself must be referred to for its use and application. ASTM does not give any warranty express or implied or make any representation that the contents of this abstract are accurate, complete or up to date. 1. Scope 1.1 This specification covers pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets. This material is intended as a raw material for electronic applications. The material is used as-supplied in some cases (for example, as e -beam evaporation sources). In other instances it may be remelted, alloyed, cast and processed by the purchaser to make finished products (for example, sputtering targets). 1.2 This specification sets purity grade levels, physical attributes, analytical methods, and packaging. 1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
ASTM Standards D1971 Practices for Digestion of Water Samples for Determination of Metals by Flame Atomic Absorption, Graphite Furnace Atomic Absorption, Plasma Emission Spectroscopy, or Plasma Mass Spectrometry Keywords aluminum; coating; evaporation; sputtering; targets; thin films; vacuum coating; Aluminum electrical conductors (semiconductors); Electronic materials/applications--specifications; Electronic thin-film applications--specifications; Evaporators/evaporation--specifications; Sputtering process/targets--specifications; Targets; Vacuum electronic applications; ICS Code ICS Number Code 31.200 (Integrated circuits. Microelectronics) DOI: 10.1520/F1513-99R11 ASTM International is a member of CrossRef. ASTM F1513This book also exists in the following packages...Subscription InformationMADCAD.com ASTM Standards subscriptions are annual and access is unlimited concurrency based (number of people that can access the subscription at any given time) from single office location. For pricing on multiple office location ASTM Standards Subscriptions, please contact us at info@madcad.com or +1 800.798.9296.
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About ASTMASTM International, formerly known as the American Society for Testing and Materials (ASTM), is a globally recognized leader in the development and delivery of international voluntary consensus standards. Today, some 12,000 ASTM standards are used around the world to improve product quality, enhance safety, facilitate market access and trade, and build consumer confidence. ASTM’s leadership in international standards development is driven by the contributions of its members: more than 30,000 of the world’s top technical experts and business professionals representing 150 countries. Working in an open and transparent process and using ASTM’s advanced electronic infrastructure, ASTM members deliver the test methods, specifications, guides, and practices that support industries and governments worldwide. |
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